Macro inspection equipment

(Surface inspection equipment, defect inspection equipment)

Equipment to perform macro surface inspections for thin-plate-like workpieces with high precision and speed. All transparent, semi-transparent and non-transparent workpieces can be measured, such as silicon wafers, compound wafers.
Its unique optical system employs edge-reflected light and Mie scattering, and achieves the highest level of sensitivity for macro inspections with a line sensor camera exclusively for ultra-low noise and an optimized telecentricity optical system.
It can also check for uneven film thickness, in addition to fine surface defects of nano-meter order. For applications such as defect classifications, please consult us.


  • Surface inspection of silicon wafers
  • Surface inspection of nanoimprinted substrates
  • Surface inspection of photolithographic-processed substrates
For Inquiries About This Product
  • Company:
    Shin-Etsu Engineering Co., LTD.
  • Department:
    Electro-Mechanics Division
  • Email: