Nanoimprint equipment

(Imprint equipment, imprint lithography, NIL)

Nanoimprinting is a process used to make fine patterns by transferring molds having nanosized patterns to a resist.
From wafers to large panels of G5 size, we can supply equipment for a wide range of nanoimprints, which prevents voids even in complicated patterns by imprinting in a vacuum.
Currently, nanoimprinting has been proposed for diverse applications, from optical surface modification such as deflection to microcircuit pattern forming and bio- or display-related ones. We can also offer other solutions to suit your needs.

Series Name

  • SENI Series

For Inquiries About This Product
  • Company:
    Shin-Etsu Engineering Co., LTD.
  • Department:
    Electro-Mechanics Division
  • Email: