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Shin-Etsu Chemical responds to the growing demand and advances in the semiconductor photoresists market


2020.10.15

Shin-Etsu Chemical Co., Ltd., (Head Office: Tokyo, President: Yasuhiko Saitoh), announced it will carry out facility investments totaling ¥30 billion in its photoresists business manufacturing bases in Japan and Taiwan. In order to respond to the growing demand for photoresists*, which are essential in cutting-edge semiconductor manufacturing, and advances in technology development, Shin-Etsu will continue making facility investments.
Going forward, further advances in the sophistication of the semiconductor manufacturing process will continue to be made. Taking into consideration both the aspects of technology and supply, Shin-Etsu will move forward in expanding its capability to timely respond to the requests of its customers. We are going to carry out production capacity increases for this purpose at our subsidiary company, Shin-Etsu Electronics Materials Taiwan Co., Ltd. (located in Douliu City, Yunlin County, Taiwan) and the Naoetsu Plant of Shin-Etsu Chemical Co., Ltd., (located in Joetsu City in Niigata Prefecture, Japan). Shin-Etsu Electronics Materials (Taiwan) has already completed its first-phase construction in the summer of 2019, and they are already going ahead with the construction of a new plant building. Now, in addition, we will further strengthen the facility’s production capabilities. The second-phase construction project is aimed for completion by February 2021. In parallel, at the Naoetsu Plant as well, we will construct a new building and go forward with the expansion of the plant’s production capacity. The completion of the construction is aimed for by February 2022.
Shin-Etsu Chemical has developed and is mass-producing high-sensitivity ArF excimer laser photoresists and multi-layer resists materials that improve the high precision of circuit patterns. Shin-Etsu is growing its photoresists business by offering its customers cutting-edge photoresists-related products. In Taiwan, one of the areas of growing demand, in July, 2019 we started production of photoresists-related materials. By having established multiple production bases for these materials, we have strengthened supply stability.
Shin-Etsu Chemical will move ahead in further strengthening its business foundation by steadily capturing the expanding demand in the semiconductor device market and the demand for semiconductor-related materials resulting from the advancement in device processes for increasing the number of transistors and enhancing power saving.

*A photoresist is a photosensitive polymer material essential in the manufacturing process of semiconductor devices. They are used in the semiconductor lithography process, a process of forming patterns coated with a photoresist by exposing integrated circuits to light – such as excimer lasers – through a mask and developing high precision three-dimensional patterns on the silicon substrate after heat treatment.



■Reference material

Shin-Etsu Electronics Materials Taiwan Co., Ltd. (located in Douliu City, Yunlin County, Taiwan)

For inquires about this matter, please contact
  • Shin-Etsu Chemical Co., Ltd. Public Relations Dept. Tetsuya Koishikawa
  • TEL: 03-3246-5091, or from outside Japan: 81-3-3246-5091
  • FAX: 03-3246-5096, or from outside Japan: 81-3-3246-5096
  • e-mail:sec-pr@shinetsu.jp
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