Shin-Etsu Chemical Co., Ltd.

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TOP > Shin-Etsu Group Materials Guide > Semiconductor Materials

Semiconductor Materials

As a super supplier of semiconductor-related materials, we supply silicon wafers and a wide variety of materials indispensable to the manufacture of semiconductors. We also supply gases, chemicals, fixtures, etc. for use in production processes.

 


Semiconductor materials

 

300mm silicon wafers
300mm silicon wafers
With the arrival of the era of full-scale mass production of 300mm wafers, customers' expectations on silicon wafers are increasingly high. As a pioneer in the world silicon market, Shin-Etsu Handotai (SEH) took the head start of the mass production of 300mm and has established a system ensuring a stable supply to the market. In responding to even higher requirements from the customers for the future, we continue the incessant efforts and challenges for the quality improvements.

Features
  • We have respond to the growing market demand in timely manner with our capacity expansions since the starting of the mass production in February 2001.
  • Our products can meet the 0.13um design rule process and beyond.
  • Our product portfolio covers wide range of the customers' various requirements.

 

Applications
  • Substrates for memory devices, microprocessor devices, etc.

 

For More Information : Semiconductor Materials Division
Phone:+81-3-3246-5211
IG-NANA wafers
IG-NANA wafers
IG-NANA wafers (annealed wafers) can be used in wide range of device processes, from high-temperature processes to low-temperature processes. This product can provide high device performances at a reasonable cost.

Features
  • Enhancement of the "getter effect" is achieved with the presence of highly-densed and highly uniformed BMD in the bulk.
  • The surface layer is defect-free.
  • Suitable for advanced technology processes with narrow design rule
  • Available also in 300mm

 

Applications
  • ubstrates for memory devices, logic devices, etc.

 

For More Information : Semiconductor Materials Division
Phone:+81-3-3246-5211
SOI (Silicon On Insulator) wafers
SOI (Silicon On Insulator) wafers
SOI wafers, with the structure having insulated oxide film under active silicon layer, are promising semiconductor material for leading edge devices such as high speed and low power consumption LSI, smart sensors, smart power devices and MEMS.

Features
  • Excellent thickness uniformity of SOI layer
  • SOI crystal quality equivalent to bulk Silicon wafers
  • Buried oxide film quality being equivalent to thermal oxide
  • Available for volume supply

 

Options: the customers can specify the following items
  • SOI layer thickness and resistivity
  • Specification of base and bond wafer
  • Buried oxide layer thickness

 

Applications
  • High speed/low power/low voltage LSI
  • System-On-Chip LSI
  • High-temperature electronics
  • Radiation-hardened circuits
  • Smart power devices
  • Smart sensors

 

For More Information : Semiconductor Materials Division
Phone:+81-3-3246-5211
Compound semiconductor materials
Compound semiconductor materials
Shin-Etsu Handotai (SEH) produces light emitting element materials such as gallium phosphide (GaP), gallium arsenide phosphide (GaAsP) and aluminum gallium indium phosphide (AlGaInP) products, which are used in light emitting diodes and lasers in the optoelectronics field. These materials possess unique functions that cannot be found in silicon semiconductors. In addition to these materials, SEH has a lineup of chips, which are one step nearer to devices.

Features
  • The materials cover the fields of GaP, GaAsP and AlGaInP.
  • Integrated production of crystal, substrate, epitaxial wafer and chip is realized.
  • The brightness, color tone and electric characteristics are ensured by excellent crystal technology, growing technology of liquid phase and gaseous vapour phase epitaxial wafers, and machining technology in each manufacturing process.
    These characteristics are well received both in Japan and abroad.

 

Applications
  • For visible light, infrared ray, functional use etc.

 

For More Information : Semiconductor Materials Division
Phone:+81-27-385-2970
Junction coating resins
Junction coating resins
Junction coating resins help to improve the reliability of semiconductor devices. They provide electrical protection of semiconductor chips, improve moisture-resistance, reduce mechanical stress, and prevent software error of VLSI.

Features
  • High purity, together with excellent adhesive capability and working property

 

Applications
  • Surface coating materials for semiconductor elements
  • Circuit protection, sealing and other uses for optical devices and flat panel display (LCD, PDP, EL, etc.) panels

 

For More Information : Organic Electronics Materials Dept.,
Electronics Materials Division
Phone:+81-3-3246-5231
http://www.shinetsu-encap-mat.jp/e/product/kjr2/
Epoxy molding compounds
Epoxy molding compounds
These encapsulating materials provide low stress, low alpha-ray property and high thermal conductivity. They are also environment-friendly.

Features
  • Superior moisture resistance, electrical characteristics, and moldability. This material meets the high requirements for resin encapsulation of devices.
  • By introducing a new, original flame-retardant system, this product is free from halogen and antimony trioxide.

 

Applications
  • D-RAM and other LSI molding, full pack molding for power devices etc.

 

For More Information : Organic Electronics Materials Dept.,
Electronics Materials Division
Phone:+81-3-3246-5231
http://www.shinetsu-encap-mat.jp/e/product/k_s/kmc/
Liquid epoxy encapsulating materials
Liquid epoxy encapsulating materials
This is a liquid epoxy resin encapsulating material for the protection and adhesion of semiconductor devices.

Features
  • Excellent low stress, adhesive, and penetration property

 

Applications
  • Under filling, COB potting, hermetic seal, and other uses for electrical or mechanical protection and highly reliable adhesion of semiconductor devices

 

For More Information : Organic Electronics Materials Dept.,
Electronics Materials Division
Phone:+81-3-3246-5231
http://www.shinetsu-encap-mat.jp/e/product/k_s/smc/
True spherical shape ultra-fine particulates "ADMAFINE"
True spherical shape ultra-fine particulates ADMAFINE
ADMAFINE is true spherical shape ultra-fine particulates produced using a special process of oxidize metallic powder. Admatechs, a joint venture of Toyota Motor, Shin-Etsu Chemical, Shin-Etsu Quartz Products and Tatsumori, succeeded in commercial production of this product as a pioneer in the world.

Features
  • The true spherical shape ultra-fine particulates have a sharp granular distribution, capable of improving the toughness, flowability, thermal conductivity and other physical properties of composite materials.
  • Not only simple oxide but also of composite oxide fine spherical particulates can be produced.
  • It is possible to coat the particles with various types of composites or classify the particles.

 

Applications
  • Filler material for semiconductor enclosure applications
  • Filler material for precision resin molding applications
  • Anti-blocking materials
  • Sintering materials

 

For More Information : Shin-Etsu Quartz Products Co., Ltd.
Phone:+81-3-3348-1916
https://www.sqp.co.jp/e/

Manufacture process materials

 

Synthetic quartz glass substrates

Shin-Etsu Chemical is a top-ranking manufacturer of synthetic quartz photomask substrates for IC and synthetic quartz large photomask substrates for LCD. For over 20 years, we have offered a stable supply of top quality substrates. Synthetic quartz wafers mainly used in high-temperature poly-Si TFT-LCD are now available up to 300mmΦ in diameter, meeting the wide range of requirements from customers.

 

Synthetic quartz photomask substrates
Synthetic quartz photomask substrates
This substrate excels in the permeability and low thermal expansibility in the far-ultraviolet range. It is suitable as photomask substrates for optical lithography and other applications that require ultra-high purity and high precision polishing (flatness processing at a submicron level).

Features
  • It has ultra-high purity, and contains no bubble, foreign matter and stria.
    Surface defects: For IC ≤ 1 µ m (SZS grade) and ≤ 2 µ m (SMS grade).
    For LCD≤ 2µm (SMS grade).
    Flatness: Various lineups are available.

 

Lineup
  • Synthetic quartz photomask substrates for IC
    : Synthetic quartz photomask substrates for g line, i line, KrF (248 nm) lithography
    : Synthetic quartz photomask substrates for ArF (193 nm) lithography
    : Synthetic quartz photomask substrates for F2 (157 nm) lithography
  • Synthetic quartz photomask substrates for LCD
    : Synthetic quartz photomask substrates for TFT
    : Synthetic quartz photomask substrates for Color Filter

 

For More Information : Opto-Electronics Materials Dept.II,
Advanced Materials Division
Phone:+81-3-3246-5222
Synthetic quartz wafers
Synthetic quartz wafers
This wafer has excellent thermal resistance and light transmission properties. It is most suitable as wafers for high temperature poly-Si TFT-LCD and other applications that require high purity and high precision polishing.

Features
  • It is an ultra-high grade product free from bubble and foreign matter.
  • Compared with ordinary glass, it possesses a low thermal expansion and extremely high permeability over the whole wavelength range from ultraviolet to infrared region.
  • We have two grades for wafers, which are VIOSIL-SQ and VIOSIL-SX. VIOSIL-SQ is same material as synthetic quartz photomask substrate. VIOSIL-SX is improved material for heat resistance to support the use in the high temperature range (1,000ºC or higher).

 

Lineup
  • External diameters from 3"φ(76.2 mm) to a maximum of 12"φ (300 mm) are included in the lineup. Other sizes are also available.

 

For More Information : Opto-Electronics Materials Dept.II,
Advanced Materials Division
Phone:+81-3-3246-5222
Quartz Glass Crucible for Silicon Single Crystal pulling applications
Quartz Glass Crucible for Silicon Single Crystal pulling applications
The "SQC Series" are quartz glass crucibles for silicon single crystal pulling in the Czochralski (CZ) process. These are manufactured with a method unique to our company using high-purity silica raw materials.

Main features
  • In the case of the standard product type, the inner layer is made of synthetic silica glass.
  • Various sizes can be manufactured from 18 inches to 40 inches.
  • Final cleaning and sealing packaging is carried out in a clean environment.

 

Applications
  • For silicon single crystal pulling applications

 

For More Information : Shin-Etsu Quartz Products Co., Ltd.
Phone:+81-3-3348-1916
https://www.sqp.co.jp/e/
Quartz glass for semiconductor production processes
Quartz glass for semiconductor production processes
Technological innovation continues in the field of semiconductor; with horizontal furnaces being replaced by vertical furnaces, wafer size evolving toward larger diameters, and so forth. We are meeting the changing demands by a broad range of product configuration and excellent processing technology.

Features
  • Various grades of natural quartz and synthetic quartz are available, ranging from general products to ultra-high purity products.
  • Specially processed products with improved heat resistance and anti-plasma property are also available.

 

Applications
  • Furnace tubes and boats used in the oxidation/diffusion process or CVD process
  • Wet cleaning tanks used in cleaning processes such as chemical treatment and ultra-pure water cleaning
  • Various parts used in dry etching

 

For More Information : Shin-Etsu Quartz Products Co., Ltd.
Phone:+81-3-3348-1913
https://www.sqp.co.jp/e/
Silicon wafer carrier and semiconductor-material container
Silicon wafer carrier and semiconductor-material container
300mm Front Opening Unified Pod-FOUP
300mm Front Opening Shipping Box-FOSB

These are carrier and containers for storing and transporting high purity materials such as silicon wafers, synthetic quartz mask substrates and other high quality chemical material used in semiconductor industry.

Features
  • Unique high-purity plastic materials
  • Manufactured in clean room environment
  • SEMI standard and automation optimized design

 

Applications
  • 125/150 /200/300 mm wafer shipping box
  • 300mm FOUP
  • Mask substrate container
  • Reticle container, and others

 

For More Information : FI Division
Shin-Etsu Polymer Co., Ltd.
Phone:+81-3-5289-3739
http://www.shinpoly.co.jp/
Silicon wafer case pouches
Silicon wafer case pouches
These are packaging bags for semiconductor silicon wafer cases, for which high levels of cleanliness and air-tightness are required.

Features
  • The products are manufactured in a clean environment within the clean room (class 1,000) using clean film as raw material, and the manufacturing process and quality are evaluated.

 

Applications
  • For packaging of silicon wafer case

 

For More Information : Shin-Etsu Film Co., Ltd.
Phone:+81-3-3259-1061
http://www.shinetsu-film.co.jp/e/
Photoresists
Photoresists
Drawing upon the extensive electronic material expertise acquired in the chemical manufacturing field, we offer the latest high-quality and high-performance KrF, ArF and F2 photoresists and other materials related to semiconductor production processes.

Features
  • It is applicable to the excimer laser process for processing designs at 0.18μm or below.
  • We also manufacture polymers and photoresist ingredients using technology developed at our company.
  • We conduct the whole production process from polymerization of raw material to finished products.

 

Applications
  • Semiconductor lithography process for the manufacture of memory and logic devices

 

For More Information : New Functional Materials Department
Phone:+81-3-3246-5346
Pellicles
Pellicles
Pellicle is a high-quality cover for the protection of photomasks against dust, which was developed based on the know-how accumulated from the development and manufacture of various electronic materials. In addition to the grade for g/i-line and the KrF excimer laser grade, the ArF excimer laser grade is also available. Through consolidated quality design, we are equipped to meet all the high level needs of our customers.

Features
  • Pellicle membrane has high transmission and excellent laser durability.
  • Adhesives for fixation of the membrane and for mounting on photomask have excellent light resistance quality, and were developed independently by our own technology.
  • Special processing of the frame surface prevents generation of particles.
  • Pellicle container was uniquely designed and is made of antistatic and dust-free materials (adaptable to auto-mounter).

 

For More Information : Special Functional Products Dept.
Phone:+81-3-3246-5345
Pyrolytic boron nitride (PBN)
Pyrolytic boron nitride (PBN)
The product is a kind of ceramics manufactured with a thermal decomposition under reduced pressure. It is mainly used for breeding III-V compound semiconductor crystals such as GaAs, which are attracting more and more attention as an element for the mobile communication MMIC or for optical devices.

Features
  • The product is pure and stable chemically.
  • Excellent in high temperature strength
  • Excellent in insulation property and thermal conductivity

 

Applications
  • For pulling of single crystals of the III-V group semiconductor
  • As dopants for doping of boron into silicon wafers
  • As crucibles for impurity analysis
  • As crucibles for organic EL

 

For More Information : Opto-Electronics Materials Dept.I,
Advanced Materials Division
Phone:+81-3-3246-5223
PG/PBN heater
PG/PBN heater
The product is a ceramic heater made by laminating two kinds of ceramics (PBN, PG), manufactured by the pressure reduced heat decomposition CVD method.

Features
  • A large type heater up to a maximum diameter of 380 mmφ
  • It is highly strong against thermal impact.
  • It is highly pure chemically and no outgassing occurs
    (being able to cope with high vacuum).
  • Heater pattern may be designed freely, and its allowable highest temperature is 1,600ºC.
  • A substrate heater and a pipe heater are available.

 

Applications
  • Substrate heater for spatter, CVD equipment and others in semiconductor production processes
  • Small heaters, substrate and tube, for special uses in high vacuum process

 

For More Information : Opto-Electronics Materials Dept.I,
Advanced Materials Division
Phone:+81-3-3246-5223
Carrier tapes
Carrier tapes
It is the package materials for transporting semiconductor devices and various surface-mounting electronic devices(SMD).

Features
  • This carrier tape can be used in BGA, CSP, WL-CSP and other high-tech packages. Design based on our unique simulation is offered.
  • Considering PKG visual inspection of the taping process, we offer carrier tapes suitable for image recognition.
    They help to improve the yield of inspection in the taping process.

 

Lineup
  • General grade for passive components and conductive grade for semiconductor devices are available.
  • Broad carrier tape(over 56mm width) for various mechanical components

 

For More Information : EP Division
Shin-Etsu Polymer Co., Ltd.
Phone:+81-3-5289-3737
http://www.shinpoly.co.jp/english/product/semicon/index.html
Silicon carbide abrasive powder
Silicon carbide abrasive powder
"SHINANO-RUNDUM" is an abrasive powder produced by the following procedures. Only the selected crystal portion is extracted from the ingot of black or green silicon carbide. They are crushed, ground to fine powder, treated chemically, graded, filtered and dried.

Lineup
  • CP and GP are made from black and green silicon carbides, respectively. CP and GP are different in crystalline property.
    CP is tough, while GP is harder and more brittle.

 

Applications
  • Wire-saw slicing of semiconductor silicon ingot etc.

 

For More Information : Shinano Electric Refining Co., Ltd.
Phone:+81-3-5298-1601
High-purity silane
High-purity silane
This is used in a wide range of industries such as electronics, chemical, ceramics, and metal industries. A lineup of tetrachlorosilane, trichlorosilane, dichlorosilane etc. is available.

Features
  • It has a wide range of application, depending on the kind of silane.

 

Applications
  • Semiconductor insulation layer, epitaxial layer etc.
  • Tetrachlorosilane is used for optical fibers.
  • Tetrachlorosilane and trichlorosilane are used for chemical products such as fine ceramics etc.

 

For More Information : Organic Electronics Materials Dept.,
Electronics Materials Division
Phone:+81-3-3246-5231
Shin-Etsu high-purity organometallics
Shin-Etsu high-purity organometallics
Organometallics precursors are used to produce thin film compound semiconductors with MOCVD technique. We have seven products, which are TMGa, TEGa, TMIn, TMAl, DMZn, DEZn and TBP.

Features
  • For all the sorts of the compound, high purity of less than 0.1-ppm metallic impurities is assured.
  • Solid raw material TMIn has also accomplished the feed stability of ±0.002 vol%(20ºC) by improving of containers and devising filling method.
  • Low oxygen TMAl has been developed by our unique method.
  • TBP is a safe liquid raw material substituted PH3.
  • We are now coping with user's needs with our unique technology and high-level analyzers.

 

Applications
  • HEMT, FET, Laser, High-brightness LED, Solar cells, etc.

 

For More Information : Opto-Electronics Materials Dept.II,
Advanced Materials Division
Phone:+81-3-3246-5222
High-purity chloromethane
High-purity chloromethane
Using natural gas found near the Naoetsu Plant of Shin-Etsu Chemical, chlorine, methanol, and hydrochloric acid as raw materials, our unique reaction technology, advanced refining techniques, and development of excellent stabilizers enable us to supply products at stable, high quality. The products include methylchloride, methylenechloride, and chloroform.

Features
  • As a solvent, it has very strong dissolving capability.
  • It has wide application as reaction raw materials.
  • It is used as a reaction solvent in order to improve the yield.
  • Because of the low boiling point, it is used as a low-temperature extraction solvent.

 

Lineup and applications
  • Methylchloride is used as reaction raw materials for silicone, methylcellulose, agricultural chemicals, surfactant, and perfume, as well as a low-temperature extracting solvent for caffeine, etc.
  • Methylene chloride is used as a reaction solvent for plastics, medicine, agricultural chemicals, and perfume, as well as a precision washing solvent for electronic equipment and optical instruments.
  • Chloroform is used as a reaction solvent and extraction solvent for drugs, agricultural chemicals, dyes, and perfume, as well as a reaction raw material for fluorocarbon resin.

 

For More Information : Chlor Chlor, Alkali & Derivatives Dept.,
PVC Division
Phone:+81-3-3246-5081