Pyrolytic boron nitride (PBN)

The product is a kind of ceramics manufactured with a thermal decomposition under reduced pressure. It is mainly used for breeding III-V compound semiconductor crystals such as GaAs, which are attracting more and more attention as an element for the mobile communication MMIC or for optical devices.

-Features-

• The product is pure and stable chemically.
• Excellent in high temperature strength
• Excellent in insulation property and thermal conductivity

-Applications-

• For pulling of single crystals of the III-V group semiconductor
• As dopants for doping of boron into silicon wafers
• As crucibles for impurity analysis
• As crucibles for organic EL

PG/PBN heater

The product is a ceramic heater made by laminating two kinds of ceramics (PBN, PG), manufactured by the pressure reduced heat decomposition CVD method.

 

 

-Features-

• A large type heater up to a maximum diameter of 380 mm
• It is highly strong against thermal impact.
• It is highly pure chemically and no outgassing occurs (being able to cope with high vacuum).
• Heater pattern may be designed freely, and its allowable highest temperature is 1,600.
• A substrate heater and a pipe heater are available.

-Applications-

• Substrate heater for spatter, CVD equipment and others in semiconductor production processes
• Small heaters, substrate and tube, for special uses in high vacuum process

 

Contact

Opto-Electronics Materials Dept. I
Advanced Materials Division
Phone : +81-3-3246-5223
Facsimile : +81-3-3246-5366