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  High-Purity Organometallics (TMG,TEG,TMI,TMA,DMZ,DEZ,TBP)
 

Organometallics precursors are used to produce thin film compound semiconductors with MOCVD technique. We have seven products, which are TMGa, TEGa, TMIn, TMAl, DMZn, DEZn and TBP.

-Features-

  • For all the sorts of the compound, high purity of less than 0.1-ppm metallic impurities is assured.
  • Solid raw material TMIn has also accomplished the feed stability of 0.002 vol%(20) by improving of containers and devising filling method.
  • Low oxygen TMAl has been developed by our unique method.
  • TBP is a safe liquid raw material substituted PH3.
  • We are now coping with user's needs with our unique technology and high-level analyzers.

-Applications-

  • HEMT, FET, Laser, High-brightness LED, Solar cells, etc.

    Contact

Opto-Electronics Materials Dept. II
Advanced Materials Division
Phone : +81-3-3246-5222
Facsimile : +81-3-3246-5366

 

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