|
|
| High-Purity Organometallics (TMG,TEG,TMI,TMA,DMZ,DEZ,TBP) |
| |
Organometallics precursors are used to produce thin film compound semiconductors with MOCVD technique. We have seven products, which are TMGa, TEGa, TMIn, TMAl, DMZn, DEZn and TBP.
-Features-
- For all the sorts of the compound, high purity of less than 0.1-ppm metallic impurities is assured.
- Solid raw material TMIn has also accomplished the feed stability of
0.002 vol%(20 ) by improving of containers and devising filling method.
- Low oxygen TMAl has been developed by our unique method.
- TBP is a safe liquid raw material substituted PH3.
- We are now coping with user's needs with our unique technology and high-level analyzers.
-Applications-
- HEMT, FET, Laser, High-brightness LED, Solar cells, etc.
Opto-Electronics Materials Dept. II
Advanced Materials Division
Phone : +81-3-3246-5222
Facsimile : +81-3-3246-5366
|
|
|
 |
|